Gas management system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11949203
APP PUB NO 20200358241A1
SERIAL NO

16965461

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gillespie, Walter Dale Poway, US 10 0
Kanawade, Dinesh Adinath San Diego, US 2 0
Luo, Edward Siqi San Diego, US 6 1
Roman, Gutierrez Yzzer Escondido, US 2 0

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