Gas management system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11949202
APP PUB NO 20200358240A1
SERIAL NO

16965458

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A gas recycle system includes a gas purifier system; a gas analysis system; a gas blending system that prepares a recycled gas mixture; and a control system configured to: determine whether a measured amount of at least one intended gas component is within a first range of acceptable values; and determine whether a measured amount of the at least one impurity gas component is within a second range of acceptable values. If the measured amount of the at least one intended gas component is not within the first range of acceptable values, the control system causes the gas blending system to add an additional gas component to the purified gas mixture to prepare the recycled gas mixture; and if the measured amount of the at least one impurity gas is not within the second range of acceptable values, the control system generates an error signal.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gillespie, Walter Dale Poway, US 10 0
Kanawade, Dinesh Adinath San Diego, US 2 0
Luo, Edward Siqi San Diego, US 6 1
Roman, Gutierrez Yzzer Escondido, US 2 0

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