Chip-scale resonant gyrator for passive non-reciprocal devices

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United States of America Patent

PATENT NO 11695382
APP PUB NO 20200350884A1
SERIAL NO

16947059

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Abstract

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A method includes depositing a first metal layer on a semiconductor substrate; etching the first metal layer to form a first electrode having a first lead; depositing a piezoelectric layer on the semiconductor substrate and first electrode; etching the piezoelectric layer to a shape of the gyrator to be formed within the circulator; depositing a second metal layer on the piezoelectric layer; etching the second metal layer to form a second electrode having a second lead, the second electrode being positioned opposite the first electrode, wherein the first lead and the second lead form an electrical port; depositing a magnetostrictive layer on the second electrode; etching the magnetostrictive layer to approximately the shape of the piezoelectric layer; depositing a third metal layer on the magnetostrictive layer; and etching the third metal layer to form a metal coil that has a gap on one side to define a magnetic port.

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Patent Owner(s)

Patent OwnerAddress
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS352 HENRY ADMINISTRATION BUILDING 506 SOUTH WRIGHT STREET URBANA IL 61801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Garcia, Tomas Manzaneque Champaign, US 3 0
Gong, Songbin Champaign, US 30 456
Lu, Ruochen Champaign, US 15 227
Shoemaker, Daniel Urbana, US 34 1437
Tu, Cheng Urbana, US 17 250
Zhao, Chengxi Urbana, US 2 3

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