Scanning probe microscope with case and elastic body
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United States of America Patent
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Jul 27, 2021
Grant Date -
Oct 29, 2020
app pub date -
Dec 27, 2019
filing date -
Apr 25, 2019
priority date (Note) -
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Abstract
A scanning probe microscope includes a case, an actuator, at least one elastic body, and a probe. The actuator includes a piezoelectric scanner having a cylindrical shape and a sample holder. The piezoelectric scanner is disposed inside the case to be coaxial with the case such that the first end is fixed to the bottom portion. The sample holder is provided at a second end of the piezoelectric scanner. At least one elastic body is disposed so as to be sandwiched between the case and at least one of the piezoelectric scanner and the sample holder.
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