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United States of America Patent
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May 4, 2021
Grant Date -
Oct 8, 2020
app pub date -
Feb 11, 2020
filing date -
Apr 4, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A driving mechanism relatively displaces a measuring unit and a sample table such that a relative positional relationship between the measuring unit and the sample table is switched between a first positional relationship and a second positional relationship. In the second positional relationship, the sample table is exposed to the outside from within a lower housing. A controller includes a high voltage generation circuit that generates a high voltage to be supplied to a scanner. A first mechanical switch causes a power supply not to supply a voltage to the high voltage generation circuit in the second positional relationship.
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