Excimer laser with uniform beam

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United States of America Patent

PATENT NO 11183808
APP PUB NO 20200303889A1
SERIAL NO

16796587

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Abstract

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Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.

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Patent Owner(s)

Patent OwnerAddress
COHERENT LASERSYSTEMS GMBH & CO KGHANS-BÖCKLER-STRASSE 12 GÖTTINGEN D-37079

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bragin, Igor Göttingen, DE 33 144
Misyuryaev, Timur Göttingen, DE 2 0
Van, Der Wilt Paul Göttingen, DE 9 38

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