Substrate fixing device
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United States of America Patent
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-
Dec 6, 2022
Grant Date -
Sep 17, 2020
app pub date -
Mar 9, 2020
filing date -
Mar 12, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate fixing device includes a base plate including therein a gas supply section, and an electrostatic chuck provided on the base plate. The electrostatic chuck includes a base having a mounting surface on which a target to be held by electrostatic attraction is mounted, an insertion hole, penetrating the base, having an inner surface that defines the insertion hole and is threaded to form a female thread, and a screw member, having an outer surface that is threaded to form a male thread, and inserted into the insertion hole to assume a mated state in which the male thread mates with the female thread. A gas from the gas supply section is supplied to the mounting surface via the screw member.
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