CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT
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United States of America Patent
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Sep 17, 2020
app pub date -
Jun 2, 2017
filing date -
Jun 2, 2016
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Abstract
Multi-zone process kits for use in a deposition chamber are provided herein. In some embodiments, a multi-zone process kit includes a body having a plurality of deposition zones formed in the body; one or more gas injection conduits fluidly coupled to a first side of each of the plurality of deposition zones via a plurality of gas inlets; an exhaust conduit fluidly coupled to a second side of each of the plurality of deposition zones via a plurality of exhaust apertures; and a multi-zone heater having a plurality of heating zones, wherein one or more of the plurality of heating zones corresponds to each of the plurality of deposition zones.
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