TRANSPARENT PRESSURE BARRIER FOR MICROWAVE PLASMA PROCESSING

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20200287258A1
SERIAL NO

16847967

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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This disclosure relates to a reactor including an energy source configured to generate a microwave in a direction of propagation. A reaction chamber is coupled to the energy source. A waveguide disposed in the reactor includes a window positioned at an angle, such as being misaligned, relative to the direction of propagation of the microwave such that an average dielectric constant experienced by the microwave increases over a region where the window occupies a greater fraction of a cross-sectional area of the waveguide. The window includes one or more dielectric materials that have respective dielectric constants that increase along the propagation direction in a first region that is adjacent to a first face of the window, and decrease in a second region that is adjacent to a second face of the window. The dielectric materials have a mass density that varies based on one or more pores formed therein.

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Patent Owner(s)

Patent OwnerAddress
LYTEN INCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Stowell, Michael W Sunnyvale, US 138 1585
Williams, Peter Todd San Carlos, US 8 27

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