Surface treatment apparatus and surface treatment method
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United States of America Patent
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Jul 19, 2022
Grant Date -
Sep 3, 2020
app pub date -
Aug 23, 2018
filing date -
Sep 20, 2017
priority date (Note) -
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Abstract
A surface treatment apparatus for subjecting a workpiece immersed at least partly in a solution to a surface treatment has: a spray nozzle facing the workpiece for spraying a treatment solution towards a working surface of the workpiece. The surface treatment apparatus has at least one of: a spray nozzle rotator to rotate the spray nozzle in a plane parallel to the working surface of the workpiece; or a workpiece rotator to rotate the workpiece in a plane perpendicular to a spraying direction of the treatment solution sprayed from the spray nozzle.
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