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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MITSUBISHI GAS CHEMICAL COMPANY INC	TOKYO 100-8324
THE SCHOOL CORPORATION KANSAI UNIVERSITY	3-35 YAMATE-CHO 3-CHOME SUITA-SHI OSAKA 5648680

International Classification(s)

• C07F:ACYCLIC, CARBOCYCLIC, OR HETEROCYCLIC COMPOUNDS CO....
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
ECHIGO, Masatoshi	Chiyoda-ku, Tokyo, JP	137	625
KUDO, Hiroto	Suita-shi, Osaka, JP	8	3
SATO, Takashi	Hiratsuka-shi, Kanagawa, JP	973	9680

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Feb 13, 2028
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Feb 13, 2032

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2020/0257,195

COMPOSITION FOR LITHOGRAPHY, PATTERN FORMATION METHOD, AND COMPOUND

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