DIODE-PUMPED SOLID-STATE LASER APPARATUS FOR LASER ANNEALING
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United States of America Patent
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Jul 23, 2020
app pub date -
Jan 13, 2020
filing date -
Jan 22, 2019
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Laser annealing apparatus includes a plurality of frequency-tripled solid-state lasers, each delivering an output beam of radiation at a wavelength between 340 nm and 360 nm. Each output beam has a beam-quality factor (M2) greater of than 50 in one transverse axis and greater than 20 in another transverse axis. The output beams are combined and formed into a line-beam that is projected on a substrate being annealed. Each output beam contributes to the length of the line-beam.
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