Acoustic wave device, filter, and multiplexer
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United States of America Patent
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Aug 29, 2023
Grant Date -
Jul 2, 2020
app pub date -
Dec 10, 2019
filing date -
Dec 27, 2018
priority date (Note) -
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Abstract
An acoustic wave device includes: a substrate; a lower electrode, an air gap being interposed between the lower electrode and the substrate; a piezoelectric film located on the lower electrode; and an upper electrode located on the piezoelectric film such that a resonance region where at least a part of the piezoelectric film is interposed between the upper electrode and the lower electrode is formed and the resonance region overlaps with the air gap in plan view, wherein a surface facing the substrate across the air gap of the lower electrode in a center region of the resonance region is positioned lower than a surface closer to the piezoelectric film of the substrate in an outside of the air gap in plan view.
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