PLASMA GENERATOR, LIGHT EMISSION ANALYSIS DEVICE AND MASS SPECTROMETER EQUIPPED WITH THE PLASMA GENERATOR, AND DEVICE STATUS DETERMINATION METHOD
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United States of America Patent
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Issued Date -
Jun 18, 2020
app pub date -
Jun 14, 2018
filing date -
Jul 13, 2017
priority date (Note) -
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Abstract
A high-frequency power supply unit (2) supplies high-frequency power to an induction coil. A status determination processing unit (81) determines a status of a plasma generator based on a change in a frequency of the high-frequency power supplied to the induction coil by the high-frequency power supply unit (2). By determining the status of the plasma generator based on the change in the frequency of the high-frequency power supplied to the induction coil, it is possible to more accurately determine the status of the device based on stable determination criteria.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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SHIMADZU CORPORATION | KYOTO |
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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INA, Kenichi | Kyoto, JP | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 |
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