APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
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United States of America Patent
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Jun 18, 2020
app pub date -
Jun 24, 2019
filing date -
Dec 17, 2018
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Abstract
An apparatus for manufacturing a semiconductor device includes: a process chamber including a plasma processing space; and a substrate supporter arranged in the process chamber and configured to support a substrate, wherein the substrate supporter includes: a base including a plurality of lift pin holes, each configured to accommodate a lift pin; and a seal band having a ring shape and protruding from the base, the seal band having an inner diameter that is less than a pitch circle diameter of the plurality of lift pin holes.
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