Method and apparatus of operating a scanning probe microscope

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United States of America Patent

PATENT NO 11002757
APP PUB NO 20200191826A1
SERIAL NO

16709624

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Abstract

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An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode workable across varying environments, including gaseous, fluidic and vacuum.

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Patent Owner(s)

Patent OwnerAddress
BRUKER NANO INCSANTA BARBARA CA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Shuiqing Santa Barbara, US 28 165
Hu, Yan Ventura, US 66 296
Su, Chanmin Ventura, US 62 764

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