Electrochemical processing device and method for operating electrochemical processing device
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United States of America Patent
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Aug 16, 2022
Grant Date -
Jun 11, 2020
app pub date -
May 14, 2019
filing date -
Dec 10, 2018
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Abstract
An electrochemical processing device includes a current supply unit, a jig, and a controller. The current supply unit provides current for an electrochemical process. The jig includes a clamping region for clamping a substrate, a plurality of processing electrodes disposed in the clamping region and connected to the current supply unit, and a plurality of measuring electrodes disposed in the clamping region. The controller is connected to the plurality of measuring electrodes. When the jig clamps the substrate to perform the electrochemical process, the controller provides a measuring current to the measuring electrode to measure the thickness of the metal layer of the substrate.
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