High Frequency Ultrasonic Transducer and Method of Fabrication
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United States of America Patent
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Jun 4, 2020
app pub date -
Nov 29, 2018
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Nov 29, 2018
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Abstract
An ultrasonic transducer that includes a delay line, a piezoelectric element, and a metal conductive layer between the delay line and the piezoelectric element. The delay line and the piezoelectric element are acoustically joined with an atomic diffusion bond to facilitate coupling ultrasonic waves from the piezoelectric element into the delay line or from the delay line into the piezoelectric element.
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