Scanning differential interference contrast in an imaging system design
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United States of America Patent
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Jul 7, 2020
Grant Date -
Apr 30, 2020
app pub date -
Sep 26, 2019
filing date -
Oct 26, 2018
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Abstract
The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.
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