Method and apparatus for controlling exhaust pressure for an extreme ultraviolet generation chamber
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United States of America Patent
Stats
-
Jun 16, 2020
Grant Date -
Apr 30, 2020
app pub date -
Dec 23, 2019
filing date -
Jun 29, 2018
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.
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International Classification(s)
- 2019 Application Filing Year
- F23G Class
- 106 Applications Filed
- 67 Patents Issued To-Date
- 63.21 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- F23G Class
- 0 % this patent is cited more than
- 5 Age
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| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Dec 16, 2027 |
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