Irregular mechanical motion detection systems and method
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United States of America Patent
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Aug 22, 2023
Grant Date -
Apr 30, 2020
app pub date -
Jun 5, 2019
filing date -
Oct 30, 2018
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Abstract
Systems and methods are provided for predicting irregular motions of one or more mechanical components of a semiconductor processing apparatus. A mechanical motion irregular prediction system includes one or more motion sensors that sense motion-related parameters associated with at least one mechanical component of a semiconductor processing apparatus. The one or more motion sensors output sensing signals based on the sensed motion-related parameters. Defect prediction circuitry predicts an irregular motion of the at least one mechanical component based on the sensing signals.
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