RESONATOR AND RESONANT DEVICE
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United States of America Patent
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Issued Date -
Apr 9, 2020
app pub date -
Dec 6, 2019
filing date -
Jun 20, 2017
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Abstract
A manufacturing method is provided for a resonant device that includes a resonator having a vibrating portion that vibrates according to a voltage applied to an electrode of the resonator. The method includes forming an adjusting film made of molybdenum oxide in a displacement region having a greater displacement caused by vibrations when the voltage is applied than a displacement of another region in the vibrating portion. The method further includes adjusting a frequency of the resonator by removing at least part of the adjusting film with laser.
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