Plasma-Treatment Device for Contactlessly Supplying HF Voltage to a Movable Plasma Electrode Unit and Method for Operating Such a Plasma-Treatment Device
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United States of America Patent
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Apr 9, 2020
app pub date -
May 18, 2017
filing date -
May 20, 2016
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Abstract
The invention relates to a plasma-treatment device, in which a plasma electrode unit can be inserted into and removed from a processing chamber, and in which high-frequency power generated by a generator is transmitted to the plasma electrode unit by means of one or more electromagnetic fields and without an electrical ohmic contact. For this purpose, the plasma-treatment device comprises a transmission apparatus, which contains a primary coupling part, which is arranged inside the processing chamber and can generate an electromagnetic field. The plasma electrode unit contains a secondary coupling part, which is rigidly connected to the plasma electrode unit and is suitable for receiving the electromagnetic field and converting it into alternating electrical power. Furthermore, a method for operating such a plasma-treatment device is provided.
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