IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD
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United States of America
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Issued Date -
Mar 12, 2020
app pub date -
Sep 9, 2019
filing date -
Sep 9, 2019
priority date (Note) -
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Abstract
An imprint method includes arranging imprint material as droplets on shot region of substrate, bringing the imprint material on part of the shot region into contact with pattern region of mold and then enlarging contact region between the imprint material and the pattern region to whole region of the shot region, and curing the imprint material. in the arranging, in each of local regions located in radial direction from the part of the shot region, the imprint material is arranged such that directional drop density of the imprint material on line parallel to direction orthogonal to the radial direction and with droplets of the imprint material present thereon is smaller than that of the imprint material on line parallel to the radial direction and with droplets of the imprint material present thereon.
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