METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT
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United States of America
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Feb 27, 2020
app pub date -
Nov 4, 2019
filing date -
Nov 4, 2019
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Abstract
Embodiments of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One embodiment of the present invention provides a hoop assembly for using a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein, and three or more lifting fingers attached to the hoop. The three or more lifting fingers are configured to support a substrate outside the inner volume of the confinement ring.
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