COMPOUND, RESIST COMPOSITION CONTAINING COMPOUND AND PATTERN FORMATION METHOD USING SAME

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United States of America

APP PUB NO 20200057370A1
SERIAL NO

16498306

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Abstract

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A resist composition comprising one or more tannin compounds selected from the group consisting of a tannin comprising at least one crosslinking reactive group in the structure and a derivative thereof, and a resin obtained using the tannin or the derivative as a monomer.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI GAS CHEMICAL COMPANY INCTOKYO 100-8324
THE SCHOOL CORPORATION KANSAI UNIVERSITY3-35 YAMATE-CHO 3-CHOME SUITA-SHI OSAKA 5648680

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ECHIGO, Masatoshi Chiyoda-ku, Tokyo, JP 137 625
KUDO, Hiroto Suita-shi, Osaka, JP 8 3
SATO, Takashi Hiratsuka-shi, Kanagawa, JP 973 9680

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