SUPPLY LINE GUIDE FOR A VACUUM PROCESSING SYSTEM, USE OF A SUPPLY LINE GUIDE AND PROCESSING SYSTEM
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United States of America
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Issued Date -
Jan 16, 2020
app pub date -
Apr 7, 2017
filing date -
Apr 7, 2017
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Abstract
A supply line guide for guiding a plurality of supply lines in a vacuum chamber of a processing system is described. The supply line guide includes a guiding arrangement including a plurality of connected elements, wherein the connected elements are angle-adjustable relative to each other. Further, the supply line guide includes a flexible tube provided around the guiding arrangement.
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