SEMICONDUCTOR SUBSTRATE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20200006493A1
SERIAL NO

16319053

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Abstract

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A technique related to a bonded semiconductor substrate capable of reducing an interface resistance is provided. The semiconductor substrate comprises a single-crystalline SiC substrate and a polycrystalline SiC substrate. The single-crystalline SIC substrate and the polycrystalline SiC substrate are bonded. A bonded region of the single-crystalline SiC substrate and the polycrystalline SiC substrate contains 1×1021 (atoms/cm3) or more of particular atoms.

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Patent Owner(s)

Patent OwnerAddress
SICOXS CORPORATION5-11-3 SHIMBASHI MINATO-KU TOKYO 105-0004

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IMAOKA, Ko Kariya-shi, JP 7 36
MINAMI, Akiyuki Tokyo, JP 13 67
MURASAKI, Takanori Kariya-shi, JP 17 65
SHIMO, Toshihisa Kariya-shi, JP 47 199
UCHIDA, Hidetsugu Tokyo, JP 20 158

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