SCANNING PROBE MICROSCOPE
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United States of America
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Issued Date -
Jan 2, 2020
app pub date -
Feb 22, 2018
filing date -
Feb 22, 2018
priority date (Note) -
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Abstract
A scanning probe microscope including a measurement light-casting section configured to cast light onto a reflective surface provided on a movable end of a cantilever; a light-detecting section configured to detect reflected light from the reflective surface with a light-receiving surface having a larger area than the incident area of the reflected light, the light-receiving surface divided into a plurality of areas; a deflection-calculating section configured to determine at preset intervals, the amount of deflection of the cantilever based on the proportion of the amounts of light incident on the plurality of areas while the distance between the base end and the sample is changed; a determining section configured to determine whether or not the amount of change in the deflection of the cantilever is equal to or larger than a previously determined threshold Kth.
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