SURFACE POLYMER COATINGS
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United States of America
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Jul 19, 2019
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Jul 19, 2019
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A plasma chamber (11′) for coating a substrate with a polymer layer, the plasma chamber includes a first electrode set (14′) and a second electrode set (14′), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets include plural electrode layers (141′, 142′) and wherein each electrode set includes plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate.
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