IMPRINT METHOD AND IMPRINT MOLD MANUFACTURING METHOD
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United States of America
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Aug 19, 2019
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Aug 19, 2019
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Abstract
An imprint method using a mold and/or a transfer substrate having a mesa structure includes a resin supply step, a contact step, a curing step, and a mold release step. In the resin supply step, a balance layer is formed by supplying a molded resin also to an area outside of a pattern formation area of the transfer substrate in which a pattern structure is to be formed.
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