System and Method for Pumping Laser Sustained Plasma with a Frequency Converted Illumination Source

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United States of America

SERIAL NO

16051559

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source configured to output illumination having a first spectral frequency and an optical frequency converter. The optical frequency converter can be configured to receive the illumination having the first spectral frequency from the illumination source and configured to output pump illumination having a second spectral frequency that is different from the first spectral frequency.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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  • 2018 Application Filing Year
  • H05H Class
  • 354 Applications Filed
  • 239 Patents Issued To-Date
  • 67.52 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bezel, Ilya Mountain View, US 73 532
Derstine, Matthew Los Gatos, US 29 281
Shchemelinin, Anatoly Bozeman, US 52 507

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges87101103301 - 1011 - 2021 - 3031 - 4005101520253035404550556065707580859095100105110

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