METHOD OF DETECTING A POLISHING SURFACE OF A POLISHING PAD USING A POLISHING HEAD, AND POLISHING APPARATUS
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United States of America Patent
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Issued Date -
Nov 21, 2019
app pub date -
May 10, 2019
filing date -
May 10, 2019
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Abstract
A method capable of accurately detecting a polishing surface of a polishing pad using a polishing head without being influenced by passage of time is disclosed. The includes: moving a polishing head in a direction perpendicular to a polishing surface of a polishing pad while applying thrust from the polishing head to the polishing pad; during the movement of the polishing head, detecting deflection of a head arm with a strain sensor, the head arm supporting the polishing head; and determining a position of the polishing head corresponding to a point in time at which an output signal from the strain sensor reaches a preset threshold value.
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