Scanning probe microscope
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United States of America Patent
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Issued Date -
Oct 24, 2019
app pub date -
Mar 1, 2019
filing date -
Apr 18, 2018
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Abstract
Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.
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