Extreme ultraviolet light generation apparatus
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United States of America Patent
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Jul 14, 2020
Grant Date -
Oct 17, 2019
app pub date -
Jun 26, 2019
filing date -
Feb 17, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
An extreme ultraviolet light generation apparatus includes: a chamber; an optical unit; a chamber reference member including a housing space in which the optical unit is housed; a height positioning mechanism configured to position, at a predetermined installation position in the housing space, the optical unit to a predetermined installation height while contacting a first part of the optical unit; and a movement mechanism configured to linearly move the optical unit in the horizontal direction in the housing space while keeping the optical unit at a guide height, and including a guide member and a retraction part, wherein the guide height of the optical unit while being guided to move toward the installation position by the guide surface is substantially equal to the installation height.
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