Microelectromechanical device, which can be used as non-volatile memory module or relay, and memory including a plurality of microelectromechanical devices
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United States of America Patent
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Nov 24, 2020
Grant Date -
Oct 17, 2019
app pub date -
Jun 26, 2019
filing date -
Jul 26, 2016
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Abstract
A microelectromechanical device, in particular a non-volatile memory module or a relay, comprising: a mobile body including a top region and a bottom region; top electrodes facing the top region; and bottom electrodes, facing the bottom region. The mobile body is, in a resting condition, at a distance from the electrodes. The latter can be biased for generating a movement of the mobile body for causing a direct contact of the top region with the top electrodes and, in a different operating condition, a direct contact of the bottom region with the bottom electrodes. In the absence of biasing, molecular-attraction forces maintain in stable mutual contact the top region and the top electrodes or, alternatively, the bottom region and the bottom electrodes.
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