VACUUM DEVICE AND METHOD FOR COATING COMPONENTS OF A VACUUM DEVICE

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United States of America Patent

APP PUB NO 20190309408A1
SERIAL NO

16306733

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Abstract

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A vacuum device comprising at least one component having a portion which, during operation of the vacuum device, is in contact with a vacuum and which is coated at least in part by a layer which absorbs gas particles, in particular with a layer of a no-evaporable getter (NEG) material.

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Patent Owner(s)

Patent OwnerAddress
PFEIFFER VACUUM COMPONENTS & SOLUTIONS GMBHANNA-VANDENHOECK-RING 44 GOETTINGEN 37081
MOVATEC GMBHDAIMLERSTRASSE 68 KEMPTEN 87437

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KRAFT, Andreas Höhn-Oellingen, DE 10 89
LAUER, Thorsten Hohenkammer, DE 11 28

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