EPITAXIAL AIN/cREO STRUCTURE FOR RF FILTER APPLICATIONS

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United States of America Patent

APP PUB NO 20190305039A1
SERIAL NO

16307588

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Abstract

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Proposed is a layer structure (1100, 1030) comprising a crystalline piezoelectric III-N layer (1110, 1032) epitaxially grown over a metal layer which is epitaxially grown over a rare earth oxide layer on a semiconductor (1102, 1002). The rare earth oxide layer includes at least two discrete portions (1104, 1004), and the metal layer includes at least one metal portion (1108, 1006) that partially overlaps adjacent discrete portions, preferably forming a bridge over an air gap (1008), particularly suitable for RF filters.

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Patent Owner(s)

Patent OwnerAddress
IQE PLCCARDIFF 3CF 0LW

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, Andrew Mountain View, US 156 2568
Dargis, Rytis Oak Ridge, US 50 270
Lebby, Michael San Francisco, US 94 985
Pelzel, Rodney Emmaus, US 28 125
Wang, Wang Nang Limpley Stoke, GB 27 507

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