Scanning probe microscope and scanning method using the same
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United States of America Patent
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Nov 17, 2020
Grant Date -
Sep 26, 2019
app pub date -
Mar 22, 2019
filing date -
Mar 26, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
To avoid applying overload on both a probe and a sample surface, and to reduce time for measuring irregular shapes on the sample surface in performing an intermittent measurement method, provided is a scanning probe microscope including: a cantilever having a probe attached thereto, the scanning probe microscope being configured to scan a sample surface by intermittently bringing the probe into contact with the sample surface; and a control device configured to perform a first operation of bringing the probe and the sample surface into contact with each other, and a second operation of separating the probe and the sample surface from each other after the first operation. The control device executes the second operation by thermally deforming the cantilever.
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