Optical element and method for manufacturing optical element
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United States of America Patent
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Jul 21, 2020
Grant Date -
Sep 19, 2019
app pub date -
May 31, 2019
filing date -
Dec 2, 2016
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Abstract
An optical element includes an optical waveguide layer. The optical waveguide includes a periodic structure of grooves. The optical waveguide layer has a layer-thickness equal to or greater than 1.5 μm and is made of material selected from a group consisting of Ta2O5, Al2O3, LiNbO3, LiTaO3, AlN, GaN, SiC, and Yttrium aluminum garnet (YAG). (D/0.5Λ)≥2.5 is satisfied where D indicates the depth of groove; and Λ indicates the pitch of the arranged grooves in the periodic structure. The unit of Λ is identical to the unit of D.
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