METHODS FOR ALIGNING A LIGHT SOURCE OF AN INSTRUMENT, AND RELATED INSTRUMENTS
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United States of America Patent
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Sep 19, 2019
app pub date -
Mar 12, 2019
filing date -
Mar 14, 2018
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Abstract
Methods for an instrument including a light source of are provided. A method for an instrument including a light source includes providing light from the light source to a target location in a process chamber. The method includes receiving the light at a sensor. The method includes determining, using data from the sensor, a first position of the light at the target location. Moreover, the method includes determining whether to adjust the light to a second position at the target location. Related instruments are also provided.
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