APPARATUS AND METHOD FOR FORMING A GAS-LIQUID MIXTURE HAVING A STABLE VAPOR CONCENTRATION
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United States of America Patent
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Sep 19, 2019
app pub date -
May 31, 2019
filing date -
Dec 7, 2016
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Abstract
Disclosed are an apparatus and a method for forming a gas-liquid mixture having a stable vapor concentration. The apparatus comprises a mixing unit (1), a guide unit (2) and an evaporation chamber (3). In the mixing unit (1), a liquid stream is directly injected into a gas stream to form a mixture. The mixture is guided into the evaporation chamber (3) through the guide unit (2). The liquid is able to be spread over the rough inner surface of the evaporation chamber (3) so as to form a gas-liquid mixture having a stable vapor concentration. The technique can be applied to adsorption measurements using ellipsometry, as well as other research and products requiring use of stable and very-low-speed fluids.
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