ANTENNA DEVICE AND PLASMA PROCESSING APPARATUS
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United States of America Patent
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Sep 12, 2019
app pub date -
Mar 11, 2019
filing date -
Mar 12, 2018
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Abstract
An antenna device according to an exemplary embodiment radiates electromagnetic waves. In the antenna device, a dielectric window is in contact with a lower wall of a first waveguide, the first waveguide is provided between the dielectric window and a second waveguide and extends in a direction crossing a tube axis of the second waveguide, a dispersion part in the first waveguide disperses the electromagnetic wave in the first waveguide, a coaxial conversion part causes propagation of the electromagnetic waves dispersed by the dispersion part to direct to a side of the dielectric window, and a front surface of the dielectric window does not have irregularities.
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