SCANNING PROBE MICROSCOPE AND SURFACE IMAGE CORRECTION METHOD
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United States of America Patent
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Sep 12, 2019
app pub date -
Nov 8, 2018
filing date -
Mar 8, 2018
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Abstract
An inclination correcting processor performs an image process for correcting inclination of a surface image to a Z direction intersecting an X direction and a Y direction on the surface image of a sample which has been acquired from scanning by a scanning processor. The inclination correcting processor extracts a plurality of pixels from the surface image on a straight line along a predetermined direction and corrects inclination of the surface image based on luminance of the extracted pixels. In a case where correction is performed on the surface image of the sample having a flat surface at least in the one direction (P direction) intersecting the X direction and the Y direction, the inclination correcting processor performs the image process such that the predetermined direction (a direction of a straight line 28) substantially matches the one direction (P direction).
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