Strain and kinetics control during separation phase of imprint process

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United States of America Patent

PATENT NO 11161280
APP PUB NO 20190232533A1
SERIAL NO

16264318

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Abstract

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Systems and methods for improving robust layer separation during the separation process of an imprint lithography process are described. Included are methods of matching strains between a substrate to be imprinted and the template, varying or modifying the forces applied to the template and/or the substrate during separation, or varying or modifying the kinetics of the separation process.

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Patent Owner(s)

Patent OwnerAddress
CITIBANK N A390 GREENWICH STREET NEW YORK NY 10013

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Byung-Jin Austin, US 194 2163
Khusnatdinov, Niyaz Round Rock, US 65 667
Lu, Xiaoming Cedar Park, US 29 193
Meissl, Mario Johannes Austin, US 38 151
Miller, Michael N Austin, US 48 790
Nimmakayala, Pawan Kumar Austin, US 20 262
Schmid, Gerard M Austin, US 35 341
Thompson, Ecron D Round Rock, US 12 251
Xu, Frank Y Austin, US 174 2481

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