WIDE-FIELD SCANNING PROBE MICROSCOPE COMBINED WITH AN APPARATUS FOR MODIFYING AN OBJECT
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United States of America Patent
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Issued Date -
Jul 18, 2019
app pub date -
May 18, 2017
filing date -
May 18, 2017
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Abstract
The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
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