Importance

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Abstract

A simply composed, cost effectively manufacturable, pressure sensor is described, comprising a platform, an electrically conductive measuring membrane connected with the platform to enclose a pressure chamber and contactable with a pressure to be measured, and an electrode spaced from the measuring membrane and electrically insulated from the measuring membrane to form together with the measuring membrane a capacitor with a capacitance variable as a function of a deflection of the measuring membrane dependent on the pressure acting on the measuring membrane, wherein the platform has an inner surface bounding the pressure chamber and lying opposite the measuring membrane, wherein an insulating layer is provided on the inner surface, especially an insulating layer of silicon dioxide, and the electrode is a conductive coating, especially a coating of doped polysilicon, applied on the inner surface on the insulating layer.

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First Claim