OXIDE SINTERED BODY AND SPUTTERING TARGET

United States of America Patent

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Issued Date
Jul 18, 2019
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Jun 16, 2017
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Jun 16, 2017

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Abstract

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An oxide sintered body includes a bixbyite phase represented by In₂O₃, and a garnet phase represented by Y₃In₂Ga₃O₁₂.

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Patent Owner	Address
IDEMITSU KOSAN CO LTD	2-1 OTEMACHI 1-CHOME CHIYODA-KU TOKYO 1008321 ?1008321

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
INOUE, Kazuyoshi	Sodegaura-shi, Chiba, JP	118	4436
SHIBATA, Masatoshi	Sodegaura-shi, Chiba, JP	45	291
TAKESHIMA, Motohiro	Sodegaura-shi, Chiba, JP	16	104
TOMAI, Shigekazu	Sodegaura-shi, Chiba, JP	57	1357

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OXIDE SINTERED BODY AND SPUTTERING TARGET

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United States of America Patent

16310388

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16310388

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