Bulk acoustic wave resonator on a stress isolated platform

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United States of America Patent

PATENT NO 10651817
APP PUB NO 20190207581A1
SERIAL NO

15857906

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Abstract

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In described examples of a micromechanical system (MEMS), a rigid cantilevered platform is formed on a base substrate. The cantilevered platform is anchored to the base substrate by only a single anchor point. A MEMS resonator is formed on the cantilevered platform.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dellas, Nicholas Stephen Dallas, US 12 16
Goodlin, Brian Plano, US 14 58
Jackson, Ricky Alan Richardson, US 28 45
Yen, Ting-Ta San Jose, US 49 143

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