Transition radiation light sources
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United States of America Patent
Stats
-
May 26, 2020
Grant Date -
Jul 4, 2019
app pub date -
Mar 6, 2019
filing date -
Sep 6, 2016
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Transition radiation from nanotubes, nanosheets, and nanoparticles and in particular, boron nitride nanomaterials, can be utilized for the generation of light. Wavelengths of light of interest for microchip lithography, including 13.5 nm (91.8 eV) and 6.7 nm (185 eV), can be generated at useful intensities, by transition radiation light sources. Light useful for monitoring relativistic charged particle beam characteristics such as spatial distribution and intensity can be generated.
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International Classification(s)
- 2019 Application Filing Year
- H01J Class
- 2606 Applications Filed
- 1833 Patents Issued To-Date
- 70.34 % Issued To-Date
Cited Art Landscape
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- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- 5 Age
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